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Components for Precision Machines
Components
We are supplying components used for highly precision machines such as semiconductor production machines and flat-panel production machines.

Material: alumina, SiC, SiSiC, etc. Low thermal expansion material (under development)

Features (Superiority over metal)
  • Weight reduction
  • Good abrasion resistance
  • Good dimensional stability due to low expansion
  • Highly precise parallelism and flatness
  • Chemical resistance, etc.
For more specific application, please contact us separately.
   
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