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We are supplying components used for highly precision
machines such as semiconductor production machines
and flat-panel production machines. |
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Material: alumina, SiC, SiSiC, etc. Low thermal
expansion material (under development)
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Features (Superiority over metal) |
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- Weight reduction
- Good abrasion resistance
- Good dimensional stability due to low expansion
- Highly precise parallelism and flatness
- Chemical resistance, etc.
For more specific application, please contact
us separately. |
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